The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Feb. 01, 2008
Frances a Houle, Fremont, CA (US);
Christopher V. Jahnes, Upper Saddle River, NJ (US);
Simone Raoux, Santa Clara, CA (US);
Stephen M Rossnagel, Pleasantville, NY (US);
Frances A Houle, Fremont, CA (US);
Christopher V. Jahnes, Upper Saddle River, NJ (US);
Simone Raoux, Santa Clara, CA (US);
Stephen M Rossnagel, Pleasantville, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Amorphous inorganic nitrides are used as release layers on templates for nanoimprint lithography. Such a layer facilitates the release of a template from a cured, hardened composition into which the template has transferred a pattern, by reducing the adhesion energy between the release layer and the cured, hardened composition. The release layer may include one or more metallic or semiconductor elements such as Al, Mn, B, Co, Ti, Ta, W and Ge.