The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Mar. 20, 2008
Yo Abe, Oshu, JP;
Mitsuru Obara, Oshu, JP;
Takahiro Abe, Oshu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate transfer apparatusincludes a substrate transport meanshaving a transport baseand a plurality of retention arms-for retaining substrates W, an optical sensorthat is used to define a horizontal optical axis L, an elevator meansfor moving the transport baseup and down, and a height detection meansfor detecting the height of the transport baserelative to the optical axis L. In accordance with a light-reception/no-light-reception detection result fed from the optical sensorand the height of the transport base, a judgment meansof a control sectionjudges whether the postures of the retention arms-relative to the horizontal plane are normal. When the judgment meansjudges that the postures of the retention arms-relative to the horizontal plane are abnormal, the control sectionexercises control to stop the substrate transport means