The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Nov. 28, 2006
Eiichi Iijima, Chigasaki, JP;
Eiichi Iijima, Chigasaki, JP;
Ulvac, Inc, Kanagawa, JP;
Abstract
Even when a gate valve for a vacuum apparatus used in a vapor deposition apparatus is in an open position, reliability of keeping a vapor deposition chamber vacuum can be improved by protecting an inner wall surface of a valve casing and a sealing member of a valve body against a vapor of a vapor deposition material. A gate valve () for a vacuum apparatus () is used as a gate valve for an electron gun (). When the valve is in a closed position, as with the related art technique, a valve body () detaches an electron gun () part from a vapor deposition chamber (). On the other hand, when the valve is in an open position, a valve chamber () is separated from the vapor deposition chamber () by inserting a cylindrical movable shield () into the valve chamber () to prevent the inner wall surface of a valve casing () and a sealing member () of the valve body () from being exposed to vapor in the vapor deposition chamber (), with the result that they are protected against the deposition of a deposition material (MgO) ().