The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Dec. 09, 2005
Applicants:
Heinz Deiters, Duelmen, DE;
Susanne Linnenberg, Schermbeck, DE;
Dirk Nachrodt, Dulsburg, DE;
Uwe Paschen, Dortmund, DE;
Holger Vogt, Muelheim, DE;
Inventors:
Heinz Deiters, Duelmen, DE;
Susanne Linnenberg, Schermbeck, DE;
Dirk Nachrodt, Dulsburg, DE;
Uwe Paschen, Dortmund, DE;
Holger Vogt, Muelheim, DE;
Assignees:
Fraunhofer—Gesellschaft zur Foerderung der angewandten Forschung e.V., Munich, DE;
Universitaet Duisburg—Essen Forsthausweg, Duisburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01C 1/012 (2006.01);
U.S. Cl.
CPC ...
Abstract
A thin-film resistor with a layer structure with a Ti layer and a TiN layer is described, wherein a layer thickness of the Ti layer and a layer thickness of the TiN layer are selected such that a resulting temperature coefficient of resistance (TCR) is smaller than 1000 ppm/° C.