The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Nov. 24, 2006
Takafumi Okudo, Nara, JP;
Yuji Suzuki, Hirakata, JP;
Yoshiyuki Takegawa, Nara, JP;
Toru Baba, Osaka, JP;
Kouji Gotou, Neyagawa, JP;
Hisakazu Miyajima, Osaka, JP;
Kazushi Kataoka, Neyagawa, JP;
Takashi Saijo, Kawanishi, JP;
Takafumi Okudo, Nara, JP;
Yuji Suzuki, Hirakata, JP;
Yoshiyuki Takegawa, Nara, JP;
Toru Baba, Osaka, JP;
Kouji Gotou, Neyagawa, JP;
Hisakazu Miyajima, Osaka, JP;
Kazushi Kataoka, Neyagawa, JP;
Takashi Saijo, Kawanishi, JP;
Panasonic Electric Works Co., Ltd., Osaka, JP;
Abstract
A sensor device having small variations in sensor characteristics and improved resistance to electrical noise is provided. This sensor device has a sensor unit, which is provided with a frame having an opening, a movable portion held in the opening to be movable relative to the frame, and a detecting portion for outputting an electric signal according to a positional displacement of the movable portion, and a package substrate made of a semiconductor material, and bonded to a surface of the sensor unit. The package substrate has an electrical insulating film on a surface facing the sensor unit. The package substrate is bonded to the sensor unit by forming a direct bonding between an activated surface of the electrical insulating film and an activated surface of the sensor unit at room temperature.