The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2011

Filed:

Feb. 01, 2010
Applicants:

Osamu Kobayashi, Ibasaki-ken, JP;

Toshihiko Ishida, Ibaraki-ken, JP;

Inventors:

Osamu Kobayashi, Ibasaki-ken, JP;

Toshihiko Ishida, Ibaraki-ken, JP;

Assignee:

Choshu Industry Co., Ltd., Sanyoonoda-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A molecular beam source for use in thin-film accumulation, which enables the adjustment of the volume of a molecular beam, which is discharged per hour by using a needle valve, to be constant irrespective of a decrease in a thin-film element-forming material remaining within a crucible, contains heatersandfor heating the thin-film element-forming materials 'a' and 'b' within cruciblesand, and valvesandfor adjusting the volumes to be discharged of molecules of the thin-film element forming materials “a” and “b”, which are generated within the cruciblesand. It further contains a controller for adjusting the opening of the valvesandby servomotorsandthrough feeding back information relating to the volumes of the molecular beams.


Find Patent Forward Citations

Kobayashi, Osamu. (2011). Method for controlling the volume of a molecular beam (U.S. Patent No. 8025734). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8025734

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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