The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Oct. 25, 2005
Teruo Asakawa, Tokyo, JP;
Teruo Asakawa, Tokyo, JP;
Tokyo Electron Limited, , JP;
Abstract
A carrying systemhas a carrying path which is laid out in such a manner as to pass through the lower sides of loading tableand the like provided at the front face side of treating devices, and covered by a cover. As the carrying path is positioned below the loading tables, the occupying areas of the loading tableand the like and portions of the region of the carrying path are shared so that space saving is achieved, and the accessibility to the treating deviceor the like from the front side thereof is improved, thereby realizing a layout which facilitates maintenance. A loading surfaceor the like of the loading tableis set to a height which allows a conventional overhead-type carrying systemand unmanned carrying vehicleof a floor-type carrying system to load an object on the loading surface, thereby ensuring the co-existence with the other carrying systems.