The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Mar. 19, 2008
Takashi Ichikawa, Nirasaki, JP;
Makoto Kobayashi, Nirasaki, JP;
Kenichi Yamaga, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
There is provided a heat processing furnace capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnacecomprises: a processing vesselfor accommodating an object to be processed w and performing thereto a heat process; and a cylindrical heaterdisposed to surround an outer circumference of the processing vessel, for heating the object to be processed w. The heaterincludes a cylindrical heat insulating member, and heating resistorsarranged along an inner circumferential surface of the heat insulating member. Each of the heating resistorsis formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin membersare arranged in the heat insulating memberat suitable intervals therebetween, the pin membersholding the heating resistorsuch that the heating resistoris movable in a radial direction of the heater.