The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Mar. 01, 2010
Applicants:
Hiroshi Yonekura, Nagano, JP;
Koki Tamagawa, Nagano, JP;
Inventors:
Hiroshi Yonekura, Nagano, JP;
Koki Tamagawa, Nagano, JP;
Assignee:
Shinko Electric Industries Co., Ltd., Nagano-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01T 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrostatic chuck includes a dielectric layerformed with an attraction and fix face onto which a plate memberis attracted and fixed, wherein the attraction and fix face of the dielectric layeris formed with a plurality of projection partseach with only a tip face abutting the plate memberformed as a flat face by grinding and formed with a coolant gas flow pathwhere a coolant gas flows is opened to the flat face of each of the projection parts