The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Dec. 06, 2007
Keiichi Tanaka, Nirasaki, JP;
Keiichi Tanaka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A sealing structure for sealing a gap between a vacuum containerand a lidcontacted to an opening of the vacuum containerto close it. A cavityis formed in an elastomer O-ringinterposed between the vacuum containerand the lid, and a cooling pipeis inserted in the cavity. The O-ring is cooled by circulating coolant in the cooling pipe. Since permeability of gas in a solid depends on a temperature, the amount of gas permeating the O-ring, especially oxygen, can be reduced by cooling the O-ring, thus maintaining a vacuum level in the vacuum containerat a high level. Since the O-ringis cooled from its inside, only the O-ringcan be cooled locally without influencing temperature controls at other parts of the vacuum device.