The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Oct. 21, 2009
Miho Sasaki, Abiko, JP;
Masahiko Ogino, Hitachi, JP;
Akihiro Miyauchi, Hitachi, JP;
Noritake Shizawa, Ninomiya, JP;
Kyoichi Mori, Oiso, JP;
Miho Sasaki, Abiko, JP;
Masahiko Ogino, Hitachi, JP;
Akihiro Miyauchi, Hitachi, JP;
Noritake Shizawa, Ninomiya, JP;
Kyoichi Mori, Oiso, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.