The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2011

Filed:

Sep. 08, 2009
Applicants:

Srinivasa R. Banna, San Jose, CA (US);

Scott Robins, San Jose, CA (US);

Inventors:

Srinivasa R. Banna, San Jose, CA (US);

Scott Robins, San Jose, CA (US);

Assignee:

T-RAM Semiconductor, Inc., Mountain View, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
Abstract

Gettering contaminants for formation of integrated circuits on a semiconductor-on-insulator structure is described. A semiconductor-on-insulator structure is configured to attract contaminants. Contaminant attractor regions are formed using ion implantation into a semiconductor layer of the semiconductor-on-insulator structure. The semiconductor layer is located above a buried insulator layer of the semiconductor-on-insulator structure. The contaminant attractor regions are spaced away from active regions. Tiles are located on an upper surface of the buried insulator layer. The contaminant attractor regions are formed adjacent to, in close proximity to, or in the tiles. At least one dielectric layer laterally adjacent to the tiles and is disposed on the upper surface of the buried insulator layer. The at least one dielectric layer at least inhibits lateral migration of contaminants to the active regions.


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