The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Dec. 16, 2008
Applicants:
Arul N. Dhas, Sherwood, OR (US);
Ming LI, West Linn, OR (US);
Joseph Bradley Laird, Sherwood, OR (US);
Inventors:
Arul N. Dhas, Sherwood, OR (US);
Ming Li, West Linn, OR (US);
Joseph Bradley Laird, Sherwood, OR (US);
Assignee:
Novellus Systems, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); A23G 3/24 (2006.01); B05C 3/00 (2006.01); B01D 47/00 (2006.01); F02M 37/00 (2006.01); F02M 69/02 (2006.01); F02M 5/08 (2006.01); B01F 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Apparatuses and methods for diverting a flow of a liquid precursor during flow stabilization and plasma stabilization stages during PECVD processes are effective at eliminating particle defects in PECVD films deposited using a liquid precursor.