The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Oct. 16, 2007
Francis Houlihan, Millington, NJ (US);
David Abdallah, Bernardsville, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
Douglas Mckenzie, Easton, PA (US);
Ruzhi Zhang, Pennington, NJ (US);
Allen G. Timko, Flemington, NJ (US);
Wookyu Kim, Bridgewater, NJ (US);
Ping-hung LU, Bridgewater, NJ (US);
Francis Houlihan, Millington, NJ (US);
David Abdallah, Bernardsville, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
Douglas McKenzie, Easton, PA (US);
Ruzhi Zhang, Pennington, NJ (US);
Allen G. Timko, Flemington, NJ (US);
WooKyu Kim, Bridgewater, NJ (US);
Ping-Hung Lu, Bridgewater, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moeity in the backbone of the polymer. The invention further relates to a process for imaging the present composition.