The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Mar. 31, 2010
Naoki Watanabe, Kawasaki, JP;
Einstein Noel Abarra, Hachioji, JP;
David Djulianto Djayaprawira, Inagi, JP;
Yasumi Kurematsu, Tokyo, JP;
Naoki Watanabe, Kawasaki, JP;
Einstein Noel Abarra, Hachioji, JP;
David Djulianto Djayaprawira, Inagi, JP;
Yasumi Kurematsu, Tokyo, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
A structure is provided in which a load lock chamber () for carrying in an unprocessed wafer from outside and carrying out a processed wafer to outside, a first end conveyance chamber () to be connected to the load lock chamber, at least one intermediate conveyance chamber (), a plurality of sets of a pair of process modules () provided adjacent to each other and capable of independent processing, and a second end conveyance chamber () disposed at the end part on the opposite side of the load lock chamber are connected in series. Each set of process modules (and) is arranged one by one between the first end conveyance chamber and the intermediate conveyance chamber, between the intermediate conveyance chambers, and between the intermediate conveyance chamber and the second end conveyance chamber, respectively.