The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
May. 10, 2010
Craig L. Brodeur, Marlborough, MA (US);
Marc Laverdiere, Wakefield, MA (US);
Robert F. Mcloughlin, Pelham, NH (US);
J. Karl Niermeyer, Tyngsboro, MA (US);
Jieh-hwa Shyu, Andover, MA (US);
Craig L. Brodeur, Marlborough, MA (US);
Marc Laverdiere, Wakefield, MA (US);
Robert F. McLoughlin, Pelham, NH (US);
J. Karl Niermeyer, Tyngsboro, MA (US);
Jieh-Hwa Shyu, Andover, MA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile