The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Jun. 30, 2006
Johan Frederik Dijksman, Weert, NL;
Anke Pierik, Eindhoven, NL;
Martin Maurice Vernhout, Geldrop, NL;
Sander Frederik Wuister, Eindhoven, NL;
Yvonne Wendela Kruijt-stegeman, Eindhoven, NL;
Ivar Schram, Weert, NL;
Johan Frederik Dijksman, Weert, NL;
Anke Pierik, Eindhoven, NL;
Martin Maurice Vernhout, Geldrop, NL;
Sander Frederik Wuister, Eindhoven, NL;
Yvonne Wendela Kruijt-Stegeman, Eindhoven, NL;
Ivar Schram, Weert, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscillation signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal.