The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Apr. 30, 2009
Chao-lung Lo, Hsinchu, TW;
Chao-Lung Lo, Hsinchu, TW;
MACRONIX International Co., Ltd., Hsinchu, TW;
Abstract
The invention is directed to a method for designing an assistant pattern of a mask pattern on a mask. The mask pattern has an assistant pattern arrangement region around a main pattern. The method comprising defining a reverse pattern of the main pattern. The reverse pattern is shrunken to be a first shrunken pattern with a first shrinking proportion and a first margin placed within the assistant pattern arrangement region. The reverse pattern is shrunken to be a second shrunken pattern with a second shrinking proportion and a second margin placed within the assistant pattern arrangement region. The first shrunken pattern and the second shrunken pattern are merged to define an assistant pattern of the mask pattern, wherein the assistant pattern entirely surrounds the main pattern.