The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Feb. 15, 2007
Mark Constant Johannes Baggen, Eindhoven, NL;
Petrus Marinus Christianus Maria Van Den Biggelaar, Nuenen, NL;
Yin Tim Tso, Eindhoven, NL;
Marcel François Heertjes, Best, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Dennis Andreas Petrus Hubertina Houben, Maastricht, NL;
Constant Paul Marie Jozef Baggen, Venlo-Blerick, NL;
Marinus Jacobus Gerardus Van DE Molengraft, Eindhoven, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
Petrus Marinus Christianus Maria Van Den Biggelaar, Nuenen, NL;
Yin Tim Tso, Eindhoven, NL;
Marcel François Heertjes, Best, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Dennis Andreas Petrus Hubertina Houben, Maastricht, NL;
Constant Paul Marie Jozef Baggen, Venlo-Blerick, NL;
Marinus Jacobus Gerardus Van De Molengraft, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a lithographic apparatus, a feedforward transfer function of a control system is determined by: a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.