The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Aug. 23, 2007
Applicants:
Shogo Ishizuka, Tsukuba, JP;
Shigeru Niki, Tsukuba, JP;
Keiichiro Sakurai, Tsukuba, JP;
Akimasa Yamada, Tsukuba, JP;
Koji Matsubara, Tsukuba, JP;
Inventors:
Shogo Ishizuka, Tsukuba, JP;
Shigeru Niki, Tsukuba, JP;
Keiichiro Sakurai, Tsukuba, JP;
Akimasa Yamada, Tsukuba, JP;
Koji Matsubara, Tsukuba, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for producing a semiconductor film having a chalcopyrite structure including a Ib group element, a IIIb group element and a VIb group element including selenium, the method including cracking selenium with plasma to generate radical selenium, and using the radical selenium in the process of forming the semiconductor film.