The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Sep. 30, 2008
Yi Feng Lee, Taoyuan County, TW;
Tzu-cheng Lin, Taipei, TW;
Chun Chi Chen, Taipei, TW;
Yun-zong Tian, Taichung County, TW;
Yi Feng Lee, Taoyuan County, TW;
Tzu-Cheng Lin, Taipei, TW;
Chun Chi Chen, Taipei, TW;
Yun-Zong Tian, Taichung County, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A method of fuzzy control for adjusting a semiconductor machine comprising: providing measurement values from first the 'parameter of a pre-semiconductor manufacturing process', second the 'parameter of the semiconductor manufacturing process', and third the “operation parameter of the semiconductor manufacturing process”; performing a fuzzy control to define two inputs and one output corresponding to the measurement values, wherein the difference between the first and third values, and the difference between the second and third values, forms the two inputs, then from the two inputs one target output is calculated by fuzzy inference; finally, determining if the target output is in or out of an acceptable range. Whereby the target output is the “machine control parameter of the semiconductor manufacturing process” and when within an acceptable range is used for adjusting the semiconductor machine.