The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Nov. 11, 2008
Wolfram Buhler, Hermaringen, DE;
Alexander Rosenthal, Aalen, DE;
Camille Stebler, Fehren, CH;
Emmerich Bertagnolli, Vienna, AT;
Heinz Wanzenbock, Vienna, AT;
Wolfram Buhler, Hermaringen, DE;
Alexander Rosenthal, Aalen, DE;
Camille Stebler, Fehren, CH;
Emmerich Bertagnolli, Vienna, AT;
Heinz Wanzenbock, Vienna, AT;
Carl Zeiss NTS GmbH, , DE;
Abstract
A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile