The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Mar. 28, 2008
Applicants:
Yoshinori Fujiyoshi, Kyoto, JP;
Tomohisa Fukuda, Tokyo, JP;
Inventors:
Yoshinori Fujiyoshi, Kyoto, JP;
Tomohisa Fukuda, Tokyo, JP;
Assignee:
Jeol, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A charged-particle beam system is offered which is equipped with a Z-motion mechanism to enable tomography. The Z-motion mechanism includes a rotary disk having three tapering surfaces on which balls are nested. The rotary disk is rotated via a worm gear to cause the balls to go upward along the tapering surfaces. This pushes an overlying elevatable disk upward, i.e., in the Z-direction. Consequently, the specimen stage is pushed up in the Z-direction.
Fujiyoshi, Yoshinori. (2011). Specimen stage-moving device for charged-particle beam system (U.S. Patent No. 8008633). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8008633
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile