The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2011
Filed:
Dec. 19, 2008
John Slocum, Medford, MA (US);
Kevin M. Keen, Medford, MA (US);
Chris Campbell, Newburyport, MA (US);
Robert Lindberg, Rockport, MA (US);
Stefan Casey, Clifton Park, NY (US);
John Slocum, Medford, MA (US);
Kevin M. Keen, Medford, MA (US);
Chris Campbell, Newburyport, MA (US);
Robert Lindberg, Rockport, MA (US);
Stefan Casey, Clifton Park, NY (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In one embodiment, the ion source has a first crucible and a second crucible. The first crucible and the second crucible are connected to the manifold assembly. In one instance, the crucibles have tamper-resistant features.