The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Jan. 29, 2008
Atsushi Kobaru, Hitachinaka, JP;
Atsushi Kobaru, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the present invention is to provide a synthesized signal forming method and an apparatus thereof for realizing both noise reduction and dosage reduction when synthesizing signals detected based on scans performed on a charged particle beam. In order to achieve the above object, with a method that synthesizes signals detected based on a plurality of scans performed on a charged particle beam to form a synthesized signal, a multiplication is performed among a plurality of signals obtained by the plurality of scans and, at the same time, for a multiplied signal, a calculation is performed in which an inverse of the number of previous scans is used as an exponent.