The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8000016 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 16, 2011

Filed:

Oct. 20, 2006
Applicants:

Koichiro Tanaka, Kanagawa, JP;

Hirotada Oishi, Kanagawa, JP;

Inventors:

Koichiro Tanaka, Kanagawa, JP;

Hirotada Oishi, Kanagawa, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

A deflecting mirror which deflects a laser beam emitted from a laser oscillator, a transfer lens, a cylindrical lens array which divides the laser beam having passed through the transfer lens into a plurality of laser beams, and a condensing lens which superposes the laser beams formed in the cylindrical lens array are included. The following formula is satisfied: 1/f=1/(a+b)+1/c, when: 'a' is a distance between an emission opening of the laser oscillator and the deflecting mirror; 'b' is a distance between the deflecting mirror and the transfer lens; “c” is a distance between the transfer lens and an incidence plane of the cylindrical lens array; and “f” is a focal length of the transfer lens.


Find Patent Forward Citations

Tanaka, Koichiro. (2011). Laser irradiation apparatus and manufacturing method of semiconductor device (U.S. Patent No. 8000016). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8000016

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…