The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Jun. 23, 2009
Andrej Rumiantsev, Dresden, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Steffen Scott, Dresden, DE;
Karsten Stoll, Sohland an der Spree, DE;
Andrej Rumiantsev, Dresden, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Steffen Scott, Dresden, DE;
Karsten Stoll, Sohland an der Spree, DE;
Cascade Microtech, Inc., Beaverton, OH (US);
Abstract
A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.