The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Mar. 23, 2009
Applicants:
Vijay Viswanathan, Apex, NC (US);
Dev Alok Girdhar, Melbourne, FL (US);
Timothy Henson, Torrance, CA (US);
David Paul Jones, South Glamorgan, GB;
Inventors:
Vijay Viswanathan, Apex, NC (US);
Dev Alok Girdhar, Melbourne, FL (US);
Timothy Henson, Torrance, CA (US);
David Paul Jones, South Glamorgan, GB;
Assignee:
International Rectifier Corporation, El Segundo, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01); H01L 21/20 (2006.01); H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process for fabrication of a semiconductor device that includes forming a first trench in a semiconductor body, forming spaced spacers in the first trench, and forming a narrower second trench at the bottom of the first trench using the spacers as a mask.