The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Mar. 28, 2008
Nobuaki Matsuoka, Koshi, JP;
Takahiro Hashimoto, Koshi, JP;
Katsuhiro Tsuchiya, Tokyo-to, JP;
Shinichi Hayashi, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Nobuaki Matsuoka, Koshi, JP;
Takahiro Hashimoto, Koshi, JP;
Katsuhiro Tsuchiya, Tokyo-to, JP;
Shinichi Hayashi, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A coating and developing system includes processing blocks of the same construction each built by stacking up a plurality of unit blocks including a film forming unit block and a developing unit block in layers. The processing blocks are arranged longitudinally between a carrier block and an interface block. The number of processing blocks like the processing blocks arranged between the carrier block and the interface block is adjusted to adjust the throughput of the coating and developing system. Thus, a coating and developing system capable of achieving a desired throughput can be easily designed and manufactured.