The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Nov. 15, 2007
Jiong-ping LU, Richardson, TX (US);
Periannan Chidambaram, Richardson, TX (US);
Srinivasan Chakravarthi, Murphy, TX (US);
Jiong-Ping Lu, Richardson, TX (US);
Periannan Chidambaram, Richardson, TX (US);
Srinivasan Chakravarthi, Murphy, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A low stress sacrificial cap layerhaving a silicon oxide liner film, a low stress silicon film, and a silicon nitride film. Alternatively, a low stress sacrificial cap layerhaving a silicon oxide liner filmand a graded silicon nitride film. Also, methodsfor fabricating a transistorhaving a low stress sacrificial cap layer
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile