The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Sep. 14, 2007
Kerstin Siury, Dresden, DE;
Niels Rackwitz, Dresden, DE;
Joern Schnapke, Radebeul, DE;
Frank Kuechenmeister, Dresden, DE;
Kerstin Siury, Dresden, DE;
Niels Rackwitz, Dresden, DE;
Joern Schnapke, Radebeul, DE;
Frank Kuechenmeister, Dresden, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
By evaluating a status signal on the basis of a fault detection classification mechanism in an electrochemical etch tool, a corresponding failure status of the tool may be obtained for each single substrate, thereby significantly reducing the risk of significant yield loss compared to conventional strategies. The fault detection and classification mechanism may be advantageously applied to the electrochemical removal of underbump metallization layers during the formation of solder bump structures.