The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Aug. 08, 2008
Akira Ikegami, Suita, JP;
Minoru Yamazaki, Hitachinaka, JP;
Hideyuki Kazumi, Hitachinaka, JP;
Koichiro Takeuchi, Hitachinaka, JP;
Hisaya Murakoshi, Tokyo, JP;
Akira Ikegami, Suita, JP;
Minoru Yamazaki, Hitachinaka, JP;
Hideyuki Kazumi, Hitachinaka, JP;
Koichiro Takeuchi, Hitachinaka, JP;
Hisaya Murakoshi, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.