The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2011

Filed:

Dec. 31, 2008
Applicants:

Tadashi Arii, Fussa, JP;

Kyoji Matsumoto, Koganei, JP;

Satoshi Otake, Tachikawa, JP;

Inventors:

Tadashi Arii, Fussa, JP;

Kyoji Matsumoto, Koganei, JP;

Satoshi Otake, Tachikawa, JP;

Assignee:

Rigaku Corporation, Akishima-Shi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); H01J 49/14 (2006.01); B01D 59/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

Ions obtained through EI process from a first gas are subjected to mass analysis to obtain ion intensities which are stored in a first file, and ions obtained through soft ionization process from a second gas having same concentration of components as that of the first gas are subjected to mass analysis to obtain ion intensities which stored in a second file, and molecular weights are determined based on parent ions from soft ionization measurement data. A mass spectrum corresponding to the determined molecular weight is read out based on an NIST database, and the ion intensity data stored in the first file and the read out NIST data are compared with each other, and component molecules of the first gas are determined based on the comparison results. Qualitative analysis of mixed gas can be conducted in real time with high accuracy by making effective use of the measurement data of both mass analysis based on EI process and mass analysis based on soft ionization process.


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