The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Apr. 25, 2007
Applicants:
Che-hoo Cho, Gyeonggi-do, KR;
Jung-eui Hong, Gyeonggi-do, KR;
Tae-woo Kim, Gyeonggi-do, KR;
In-mun Hwang, Gyeonggi-do, KR;
Inventors:
Che-Hoo Cho, Gyeonggi-do, KR;
Jung-Eui Hong, Gyeonggi-do, KR;
Tae-Woo Kim, Gyeonggi-do, KR;
In-Mun Hwang, Gyeonggi-do, KR;
Assignee:
Milaebo Co., Ltd., Hwaseong-Shi, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 50/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.