The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Sep. 11, 2008
Tadahiro Ohmi, Sendai, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Masafumi Kitano, Osaka, JP;
Akihiro Morimoto, Osaka, JP;
Tadahiro Ohmi, Sendai, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Masafumi Kitano, Osaka, JP;
Akihiro Morimoto, Osaka, JP;
Fujikin Incorporated, Osaka, JP;
Other;
Abstract
The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.