The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2011

Filed:

Aug. 29, 2007
Applicants:

Daniel Y Abramovitch, Palo Alto, CA (US);

Storrs T. Hoen, Brisbane, CA (US);

Richard K. Workman, Sunnyvale, CA (US);

Inventors:

Daniel Y Abramovitch, Palo Alto, CA (US);

Storrs T. Hoen, Brisbane, CA (US);

Richard K. Workman, Sunnyvale, CA (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/02 (2006.01); G06F 19/00 (2011.01);
U.S. Cl.
CPC ...
Abstract

Linear PID controllers have a transfer function that resembles the frequency response of a notch filter. The PID parameters, K, K, and K(proportional, integral, and derivative gains, respectively) can be extracted from the parameters of a linear notch filter. The linearized modes of scanning probe microscope (SPM) actuators have frequency responses that resemble those of simple second order resonance. Reasonable feedback control can be achieved by an inverse dynamics model of the resonance. A properly parameterized notch filter can cancel the dynamics of a resonance to give good closed-loop response.


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