The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2011

Filed:

Aug. 14, 2007
Applicants:

Ho-man Rodney Chiu, San Jose, CA (US);

Daniel O. Clark, Pleasanton, CA (US);

Shaun W. Crawford, San Ramon, CA (US);

Jay J. Jung, Sunnyvale, CA (US);

Leonard B. Todd, Napa, CA (US);

Robbert Vermeulen, Pleasant Hill, CA (US);

Inventors:

Ho-Man Rodney Chiu, San Jose, CA (US);

Daniel O. Clark, Pleasanton, CA (US);

Shaun W. Crawford, San Ramon, CA (US);

Jay J. Jung, Sunnyvale, CA (US);

Leonard B. Todd, Napa, CA (US);

Robbert Vermeulen, Pleasant Hill, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 50/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.


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