The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2011
Filed:
Jan. 24, 2009
Martin R. Elliott, Pepperell, MA (US);
Vinay K. Shah, San Mateo, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Martin R. Elliott, Pepperell, MA (US);
Vinay K. Shah, San Mateo, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems, methods, and apparatus are provided for electronic device manufacturing. The invention includes removing a first substrate carrier and a second substrate carrier from a moving conveyor using an end effector assembly and concurrently transferring the first and second substrate carriers from the moving conveyor to a support location via the end effector assembly. Numerous other aspects are provided.