The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2011

Filed:

Oct. 10, 2008
Applicants:

Chiaki Kudou, Hyogo, JP;

Osamu Kusumoto, Nara, JP;

Koichi Hashimoto, Osaka, JP;

Inventors:

Chiaki Kudou, Hyogo, JP;

Osamu Kusumoto, Nara, JP;

Koichi Hashimoto, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device includes: a semiconductor substrate of silicon carbide of a first conductivity type; a silicon carbide epitaxial layer of the first conductivity type, which has been grown on the principal surface of the substrate; well regions of a second conductivity type, which form parts of the silicon carbide epitaxial layer; and source regions of the first conductivity type, which form respective parts of the well regions. A channel epitaxial layer of silicon carbide is grown over the well regions and source regions of the silicon carbide epitaxial layer. A portion of the channel epitaxial layer located over the well regions functions as a channel region. A dopant of the first conductivity type is implanted into the other portions and of the channel epitaxial layer except the channel region.


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