The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2011
Filed:
Apr. 21, 2008
Mitsukuni Tsukihara, Ehime, JP;
Mitsuaki Kabasawa, Ehime, JP;
Hiroshi Matsushita, Ehime, JP;
Takanori Yagita, Ehime, JP;
Yoshitaka Amano, Ehime, JP;
Yoshito Fujii, Ehime, JP;
Mitsukuni Tsukihara, Ehime, JP;
Mitsuaki Kabasawa, Ehime, JP;
Hiroshi Matsushita, Ehime, JP;
Takanori Yagita, Ehime, JP;
Yoshitaka Amano, Ehime, JP;
Yoshito Fujii, Ehime, JP;
SEN Corporation, Tokyo, JP;
Abstract
In a beam processing apparatus including a beam scanner having a two electrodes type deflection scanning electrode, the beam scanner further includes shielding suppression electrode assemblies respectively at vicinities of upstream side and downstream side of the two electrodes type deflection scanning electrode and having openings in a rectangular shape for passing a charged particle beam. Each of the shielding suppression electrode assemblies is an assembly electrode comprising one sheet of a suppression electrode and two sheets of shielding ground electrodes interposing the suppression electrode. A total of front side portions and rear side portions of the two electrodes type deflection scanning electrode is shielded by the two sheets of shielding ground electrodes.