The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2011
Filed:
Jul. 11, 2005
Applicants:
Theodore A. Paxton, Chandler, AZ (US);
Todd J. Davis, Temple, AZ (US);
Todd D. Hiar, Gilbert, AZ (US);
Cassandra May Owen, Chandler, AZ (US);
Steven George Hansen, Phoenix, AZ (US);
James J. Hunter, Tempe, AZ (US);
Inventors:
Theodore A. Paxton, Chandler, AZ (US);
Todd J. Davis, Temple, AZ (US);
Todd D. Hiar, Gilbert, AZ (US);
Cassandra May Owen, Chandler, AZ (US);
Steven George Hansen, Phoenix, AZ (US);
James J. Hunter, Tempe, AZ (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form an image having enhanced resolution.