The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2011
Filed:
Mar. 30, 2007
Nobuyasu Hiraoka, Kyoto, JP;
Tsuyoshi Okumura, Kyoto, JP;
Akiyoshi Nakano, Kyoto, JP;
Hajime Ugajin, Kanagawa, JP;
Nobuyasu Hiraoka, Kyoto, JP;
Tsuyoshi Okumura, Kyoto, JP;
Akiyoshi Nakano, Kyoto, JP;
Hajime Ugajin, Kanagawa, JP;
Dainippon Screen Mfg. Co., Ltd., , JP;
Sony Corporation, , JP;
Abstract
A substrate treatment apparatus including a substrate holding mechanism for holding a substrate; a first brush made of an elastically deformable material and having a cleaning surface inclined with respect to a perpendicular direction perpendicular to one surface of the substrate held by the substrate holding mechanism; a first brush moving mechanism for moving the first brush with respect to the substrate held by the substrate holding mechanism; a controller for controlling the first brush moving mechanism so that the cleaning surface is made to contact with a peripheral area on the one surface and a peripheral end face of the substrate held by the substrate holding mechanism; and a first pushing pressure holding mechanism for holding a pushing pressure of the first brush in the perpendicular direction to the peripheral area on the one surface of the substrate at a preset pushing pressure.