The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Aug. 14, 2009
Peter DE Groot, Middletown, CT (US);
Mark Davidson, Palo Alto, CA (US);
Jan Liesener, Middletown, CT (US);
Xavier Colonna DE Lega, Middlefield, CT (US);
Leslie L. Deck, Middletown, CT (US);
Peter De Groot, Middletown, CT (US);
Mark Davidson, Palo Alto, CA (US);
Jan Liesener, Middletown, CT (US);
Xavier Colonna De Lega, Middlefield, CT (US);
Leslie L. Deck, Middletown, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
Interferometry system are disclosed that include a detector sub-system including a monitor detector, interferometer optics for combining test light from a test object with primary reference light from a first reference interface and secondary reference light from a second reference interface to form a monitor interference pattern on a monitor detector, wherein the first and second reference interfaces are mechanically fixed with respect to each other and the test light, a scanning stage configured to scan an optical path difference (OPD) between the test light and the primary and secondary reference light to the monitor detector while the detector sub-system records the monitor interference pattern for each of a series of OPD increments, and an electronic processor electronically coupled to the detector sub-system and the scanning stage, the electronic processor being configured to determine information about the OPD increments based on the detected monitor interference pattern.