The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
May. 15, 2006
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Oleg Voznyi, Eindhoven, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Majid El Bouchaibi, Veldhoven, NL;
Franciscus Johannes Maria Boekholt, Eindhoven, NL;
Remko Wakker, Eindhoven, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Oleg Voznyi, Eindhoven, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Majid El Bouchaibi, Veldhoven, NL;
Franciscus Johannes Maria Boekholt, Eindhoven, NL;
Remko Wakker, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate is disclosed, the apparatus including a substrate table constructed to hold a substrate, a first clamping system configured to clamp the substrate table to a substrate table support structure, and a second clamping system configured to clamp a substrate to the substrate table after the substrate table has been clamped to the substrate table support structure.