The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Aug. 13, 2010
Hee-moon Jeong, Yongin-si, KR;
Jin-woo Cho, Seongnam-si, KR;
Yong-hwa Park, Yongin-si, KR;
Jun-o Kim, Yongin-si, KR;
Seok-mo Chang, Bucheon-si, KR;
Hee-moon Jeong, Yongin-si, KR;
Jin-woo Cho, Seongnam-si, KR;
Yong-hwa Park, Yongin-si, KR;
Jun-o Kim, Yongin-si, KR;
Seok-mo Chang, Bucheon-si, KR;
Samsung Electro Mechanics Co., Ltd, Suwon-si, KR;
Abstract
A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.