The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Aug. 20, 2009
Kuan-neng Chen, White Plains, NY (US);
Lia Krusin-elbaum, Dobbs Ferry, NY (US);
Dennis M. Newns, Yorktown Heights, NY (US);
Sampath Purushothaman, Yorktown Heights, NY (US);
Kuan-Neng Chen, White Plains, NY (US);
Lia Krusin-Elbaum, Dobbs Ferry, NY (US);
Dennis M. Newns, Yorktown Heights, NY (US);
Sampath Purushothaman, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Programmable via devices and methods for the fabrication thereof are provided. In one aspect, a programmable via device is provided. The programmable via device includes a first dielectric layer; a heater over the first dielectric layer; an air gap separating at least a portion of the heater from the first dielectric layer; an isolation layer over the first dielectric layer covering at least a portion of the heater; a capping layer over a side of the isolation layer opposite the first dielectric layer; at least one programmable via extending through the capping layer and at least a portion of the isolation layer and in contact with the heater, the programmable via including at least one phase change material; a conductive cap over the programmable via; a second dielectric layer over a side of the capping layer opposite the isolation layer; a first conductive via and a second conductive via, each extending through the second dielectric layer, the capping layer and at least a portion of the isolation layer and in contact with the heater; and a third conductive via extending through the second dielectric layer and in contact with the conductive cap.