The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Apr. 11, 2008
Makoto Hirano, Toyama, JP;
Akihiro Yoshida, Toyama, JP;
Makoto Hirano, Toyama, JP;
Akihiro Yoshida, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holderfor holding substratesin a multistage manner and a substrate transfer unitfor transferring the substratesinto the substrate holder, wherein a substrate holding condition of the substrate holderis sensed by a sensing section. The sensing sectionhas photo-sensors, and sensing waveforms sensed by the photo-sensorsare compared with a normal waveform. A control sectionis provided, which controls a substrate transfer unitsuch that substratesother than at least a substratethat was determined to be abnormal are transferred by the unit.