The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2011
Filed:
May. 13, 2008
Chung-yi Lee, Boise, ID (US);
Fei Wang, Boise, ID (US);
Chung-Yi Lee, Boise, ID (US);
Fei Wang, Boise, ID (US);
Aptina Imaging Corporation, George Town, Grand Cayman, KY;
Abstract
Embodiments of the present invention provide computer readable media encoded with executable instructions for modeling an intensity profile at a surface illuminated by an illumination source through a mask. Further embodiments provide methods for correcting a mask pattern and methods for selecting an illumination source. Still further embodiments provide masks and integrated circuits produced using a model of the illumination source. Embodiments of the present invention take into account the polarization of the illumination source and are able to model the effect of polarization on the resultant intensity profile.