The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2011
Filed:
Feb. 17, 2011
Jaehyun Kim, Fremont, CA (US);
Arthur H. Sato, San Jose, CA (US);
Keith Comendant, Fremont, CA (US);
Qing Liu, Austin, TX (US);
Feiyang Wu, San Francisco, CA (US);
Jaehyun Kim, Fremont, CA (US);
Arthur H. Sato, San Jose, CA (US);
Keith Comendant, Fremont, CA (US);
Qing Liu, Austin, TX (US);
Feiyang Wu, San Francisco, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.