The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2011
Filed:
Nov. 29, 2002
Toyoji Shinohara, Tokyo, JP;
Yoichi Mori, Tokyo, JP;
Yasuhiko Suzuki, Tokyo, JP;
Hiroshi Aono, Tokyo, JP;
Yuji Shirao, Tokyo, JP;
Toyoji Shinohara, Tokyo, JP;
Yoichi Mori, Tokyo, JP;
Yasuhiko Suzuki, Tokyo, JP;
Hiroshi Aono, Tokyo, JP;
Yuji Shirao, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An apparatus for treating an exhaust gas that includes a pre-treatment section that removes a powdery component, a water-soluble component or a hydrolytic component from the exhaust gas. The exhaust gas contains a fluorine compound and CO. A heating oxidative decomposing section performs heating oxidative decomposition of at least one of the fluorine compound and CO to detoxify the exhaust gas. The apparatus also has a post-treatment section for post-treating an acid gas such as HF which has been produced by the heating oxidative decomposition.